Ion Beam Analysis

Description

Nuclear Instruments and Methods, Volume 168: Ion Beam Analysis presents the proceedings of the Fourth International Conference on Ion Beam Analysis, held in Aarhus, Denmark, on June 25–29, 1979. This book provides information pertinent to the methods and applications ion beam analysis.
Organized into eight parts encompassing 95 chapters, this volume begins with an overview of the straggling of energy loss for protons and alpha particles. This text then examines the method for the calculation of the stopping of energetic ions in matter. Other chapters consider the method for measuring relative stopping powers for light energetic ions in highly reactive materials. This book discusses as well the stopping power and straggling of lithium ions with velocities around the Bohr velocity. The final chapter deals with the adsorption behavior of different gases on monocrystalline platinum surfaces.
This book is a valuable resource for scientists, technologists, students, and research workers.

Front Cover 2
Ion Beam Analysis 7
Copyright Page 8
PREFACE 9
Conference Photo 10
Table of Contents 13
Part I: Stopping power and straggling 19
- CHAPTER 1. STRAGGLING IN ENERGY LOSS OF ENERGETIC HYDROGEN AND HELIUM IONS 19
  - 1. Introduction 19
  - 2. Theory 19
  - 3. Comparison with experimental results for H and He ions 27
  - References 32

Front Cover 2
Ion Beam Analysis 7
Copyright Page 8
PREFACE 9
Conference Photo 10
Table of Contents 13
Part I: Stopping power and straggling 19
- CHAPTER 1. STRAGGLING IN ENERGY LOSS OF ENERGETIC HYDROGEN AND HELIUM IONS 19
  - 1. Introduction 19
  - 2. Theory 19
  - 3. Comparison with experimental results for H and He ions 27
  - References 32
- CHAPTER 2. THE STOPPING OF ENERGETIC IONS IN SOLIDS 35
  - 2. Electronic stopping of ions 35
  - 3. Interaction of a particle with a free electron gas 35
  - 1. Introduction 35
  - 4. The effective charge of energetic ions 36
  - 5. The charge distributions of elemental targets 38
  - 6. Distribution of energy loss to target electrons 38
  - 7. Nuclear stopping of ions 39
  - 8. Relativistic corrections 39
  - References 42
- CHAPTER 3. ENERGY-LOSS STRAGGLING OF ALPHA PARTICLES IN Al, Ni AND Au 43
  - 2. Experimental method 43
  - 3. Results and discussion 43
  - 1. Introduction 43
  - References 45
- CHAPTER 4. SEARCH FOR THE INFLUENCE OF CHEMICAL EFFECT ON THE STOPPING POWER: THE CASE OF OXIDES 47
  - 3. Experimental 47
  - 1. Introduction 47
  - 2. Method of study 47
  - 4. Results and discussion 48
  - References 49
- CHAPTER 5. STOPPING RATIOS OF 50-300 keV LIGHT IONS IN METALS 51
  - 2. The simplified stopping function 51
  - 1. Introduction 51
  - 3. Experimental 52
  - 4. Data evaluation 53
  - 5. Results and discussion 53
  - References 57
- CHAPTER 6. HYDROGEN AND HELIUM STOPPING POWERS OF RARE-EARTH METALS 59
  - 1. Introduction 59
  - 2. Experimental 60
  - 3. Data analysis 61
  - 4. Results and discussion 62
  - References 67
- CHAPTER 7. ENERGY LOSS OF LIGHT IONS IN DIAMOND 69
  - 2. Experiment 69
  - 1. Introduction 69
  - 3. Results and discussion 70
  - References 73
- CHAPTER 8. ELECTRONIC ENERGY LOSS OF H, D AND He IN Au BELOW 20 keV 75
  - 2. Experiment 75
  - 1. Introduction 75
  - 3. Results 76
  - 4. Discussion 78
  - 5. Conclusions 79
  - References 79
- CHAPTER 9. STOPPING POWERS AND BACKSCATTERED CHARGE FRACTIONS FOR 20–150 keV H+ AND He+ ON GOLD 81
  - 1. Introduction 81
  - 2. Experimental 81
  - 3. Analysis 82
  - 4. Results and discussion 84
  - References 86
  - 5. Summary 86
- CHAPTER 10. RANGE PARAMETERS OF PROTONS IN SILICON IMPLANTED AT ENERGIES FROM 0.5 TO 300 keV 87
  - 2. Experiment 87
  - 1. Introduction 87
  - 3. Analysis of moments and comparison with theory 89
  - 4. Stopping power of hydrogen in silicon 91
  - References 91
- CHAPTER 11. STOPPING POWER AND STRAGGLING OF 80-500 keV LITHIUM IONS IN C, Al, Ni, Cu, Se, Ag, AND Te 93
  - 1. Introduction 93
  - 2. Experimental technique 93
  - 3. Stopping power results and discussion 95
  - 4. Straggling results and discussion 96
  - 5. Conclusions 97
  - References 98
- CHAPTER 12. ENERGY LOSS OF PROTONS IN Si, Ge AND Mo 99
  - 1. Introduction 99
  - References 102
- Part II: Cross sections for ion beam analysis 103
  - CHAPTER 13. NUCLEAR CROSS SECTIONS FOR ION BEAM ANALYSIS 103
    - 1. Introduction 103
    - 2. Ion beam analysis 103
    - 3. Ion-ion reactions 104
    - 4. Ion-neutron reactions 106
    - 5. Ion-gamma reactions 107
    - 6. Conclusion 108
    - References 109
  - CHAPTER 14. MICROANALYSIS OF FLUORINE BY NUCLEAR REACTIONS I. 19F(p, α0)16O and 19F(p, α y )16O reactions 111
    - 1. Introduction 111
    - 2. Experimental 112
    - 3. Results 113
    - 4. Discussion and applications 118
    - References 121
  - CHAPTER 15. THE 14N(d,p5)15N CROSS SECTION, 0.32-1.45 MeV 123
    - 1. Introduction 123
    - 2. Experimental procedure and analysis 123
    - 3. Results and discussion 125
    - References 127
  - CHAPTER 16. A NOTE ON THE 3He + D NUCLEAR-REACTION CROSS SECTION 129
    - 1. Introduction 129
    - 2. Experimental 129
    - 3. Results and discussion 131
    - References 132
  - CHAPTER 17. PROTON INDUCED y-RAY YIELDS 133
    - 1. Introduction 133
    - 3. Stopping power corrections 134
    - 2. Experimental method 134
    - 4. Experimental results 135
    - 5. Discussion of results 136
    - References 138
  - CHAPTER 18. QUANTITATIVE MICRO ANALYSIS BY HEAVY ION BEM INDUCED X-RAY EXCITATION 139
    - 2. Experiment 139
    - 1. Introduction 139
    - 4. Discussion 140
    - 3. Analysis 140
    - References 141
  - CHAPTER 19. DETERMINATION OF OXYGEN IN THIN FILMS WITH THE 16O(3He, py)18F REACTION 143
    - 1. Introduction 143
    - 2. Experimental details and results 144
    - 3. Application to chrome black 145
    - 4. Summary 146
    - References 147
  - CHAPTER 20. A COMPARISON OF THIN AND THICK TARGET METHODS OF MEASURING PROTON-INDUCED K-SHELL IONIZATION CROSS-SECTIONS 149
    - 1. Introduction 149
    - 3. Data analysis 150
    - 2. Experimental procedure 150
    - 4. Results 151
    - 5. Discussion 153
    - 6. Conclusions 155
    - References 155
  - Part III: Methods and apparatus 157
    - CHAPTER 21. HIGH RESOLUTION SCANNING ION PROBES: APPLICATIONS TO PHYSICS AND BIOLOGY 157
      - 1. Introduction 157
      - 2. Ion probes of high spatial resolution 158
      - 3. STIM studies of hydrogen ion-solid interactions 159
      - 4. Prospects for high resolution imaging microanalysis 162
      - 5. Contrast and minimization of dose in the STIM and STEM 164
      - References 166
    - CHAPTER 22. USE OF NON-COULOMB H ION BACKSCATTERING TO CHARACTERIZE THICK ANODIZED ALUMINUM FILMS 169
      - 1. Introduction 169
      - 2. Calculation from stopping powers 170
      - 3. Experimental 171
      - 4. Application to anodized layers 172
      - References 173
      - 5. Conclusions 173
    - CHAPTER 23. SURFACE TOPOLOGY USING RUTHERFORD BACKSCATTERING 175
      - 1. Introduction 175
      - 2. Scattering from smooth surfaces 175
      - 3. Rough surfaces 176
      - 4. Periodic surfaces 177
      - 7. Results 178
      - 5. Conservation rules 178
      - 8. Surfaces with random roughness 178
      - 6. The experiment 178
      - References 180
    - CHAPTER 24. EFFECTS OF SURFACE ROUGHNESS ON BACKSCATTERING SPECTRA 181
      - 2. Experimental details 181
      - 1. Introduction 181
      - 3. Results 182
      - References 185
      - 4. Conclusions 185
    - CHAPTER 25. A GOLD AND ALUMINIUM IMPLANTED STANDARD FOR ION BEAM EXPERIMENTS 187
      - 1. Introduction 187
      - 2. Experimental techniques; preparation of samples 188
      - 3. Principle of the method 188
      - 4. Experimental results and discussion 189
      - 5. Conclusions 191
      - References 192
    - CHAPTER 26. IRRADIATION CHAMBER AND SAMPLE CHANGER FOR BIOLOGICAL SAMPLES 193
      - 1. Introduction 193
      - 2. Apparatus 194
      - 3. First results 196
      - References 197
    - CHAPTER 27. THE HIGH SENSITIVITY MEASUREMENT OF CARBON USING THE NUCLEAR MICROPROBE 199
      - 1. Introduction 199
      - 2. Optimisation of the carbon measurement sensitivity 199
      - 3. The measurement of carbon in nickel 'tab' monitors 201
      - 4. Light element interferences 202
      - 5. The measurement of the distribution of carbon in a carbon meter iron membrane 203
      - 6. Conclusions 203
      - References 203
    - CHAPTER 28. A NEW TECHNIQUE FOR BACKSCATTERING ANALYSIS 205
      - 1. Introduction 205
      - 3. Experimental procedure 206
      - 2. Analytical procedure 206
      - Appendix 207
      - 4. Conclusion 207
      - References 208
    - CHAPTER 29. ELIMINATION OF THE BEAM EFFECT ON CHANNELING DIPS OF BISMUTH IMPLANTED IN SILICON 209
      - 1. Introduction 209
      - 2. Experimental 209
      - 3. Results and discussion 210
      - 4. Conclusion 212
      - References 212
    - CHAPTER 30. DECHANNELLING AND THE NATURE OF DEFECT STRUCTURES IN NATURAL TYPE la DIAMONDS 213
      - 1. Introduction 213
      - 2. Classification of diamonds 214
      - 3. Experimental methods 215
      - 4. Results and discussion 215
      - References 220
    - CHAPTER 31. THE NUCLEAR MICROPROBE DETERMINATION OF THE SPATIAL DISTRIBUTION OF STABLE ISOTOPE TRACERS 221
      - 2. Appraisal of the nuclear microprobe determination of the spatial distribution of stable isotope tracers 221
      - 1. Introduction 221
      - 3. Conclusion and future prospects 226
      - References 226
    - CHAPTER 32. CHARACTERIZATION OF AMORPHOUS SILICON FILMS BY RUTHERFORD BACKSCATTERING SPECTROMETRY 229
      - 1. Introduction 229
      - 3. Experimental results and discussions 230
      - 2. Experimental 230
      - References 233
      - 4. Summary and conclusion 233
    - CHAPTER 33. A METHOD FOR DETERMINING DEPTH PROFILES OF TRANSITION ELEMENTS IN STEELS 235
      - 1. Introduction 235
      - 2. Experimental profiling 237
      - Conclusions 239
      - References 239
    - CHAPTER 34. DEPTH PROFILING OF DEUTERIUM WITH THE D(3He,P)4He REACTION 241
      - 2. Experimental 241
      - 1. Introduction 241
      - 3. Results 242
      - 4. Conclusions 242
      - References 243
    - CHAPTER 35. COINCIDENCE MEASUREMENTS BETWEEN SCATTERED PARTICLES AND X-RAYS TO OBTAIN HIGH DEPTH AND MASS RESOLUTION 245
      - 2. General considerations 245
      - 1. Introduction 245
      - 3. Experiment and results 247
      - 4. Discussion 249
      - References 249
    - CHAPTER 36. ION BEAM MONITORING USING THIN SELF-SUPPORTING REFERENCE FOILS 251
      - 1. Introduction 251
      - 2. Principle of the method 251
      - 3. Experimental details 252
      - 4. Results 256
      - 5. Conclusion 257
      - References 258
    - CHAPTER 37. HEAVY ION MICROLITHOGRAPHY - A NEW TOOLTO GENERATE AND INVESTIGATE SUBMICROSCOPIC STRUCTURES 259
      - 2. How heavy ion microlithograms are made 259
      - 1. Introduction 259
      - 3. Some experimental results 260
      - 4. The special usefulness of heavy ions for microlithography 261
      - 5. Conclusions 263
      - References 264
    - CHAPTER 38. A NEW ELECTROSTATIC ION MICROPROBE SYSTEM 265
      - 1. Introduction 265
      - 2. Spherical aberration 265
      - 3. Multiple element lenses 266
      - 4. Discussion 267
      - References 267
    - CHAPTER 39. TRACE ELEMENT DETECTION SENSITIVITY IN PIXE ANALYSIS BY MEANS OF AN EXTERNAL PROTON BEAM 269
      - 1. Introduction 269
      - 2. Experimental set-up 270
      - 3. Experimental determination of minimum detection limits 271
      - 4. Conclusions 274
      - References 275
    - CHAPTER 40. ADVANCES IN THE USE OF PIXE AND PESA FOR AIR POLLUTION SAMPLING 277
      - 2. Aerosol analysis by PIXE and PESA 277
      - 1. Introduction 277
      - 3. Air particulate samplers 278
      - 4. Computer codes 279
      - 5. Applications to industrial and coastal aerosols 279
      - References 281
      - 6. Conclusion 281
    - Part IV: Radiation damage, defects, and diffusion 283
      - CHAPTER 41. ION-BEAM-INDUCED MIGRATION AND ITS EFFECT ON CONCENTRATION PROFILES 283
        
        1. Introduction 283
        
        2. Atomic displacement rates 283
        
        3. Cascade mixing 284
        
        4. Enhanced diffusion 285
        
        5. Diffusion along extended defects 288
        
        6. Defect trapping 289
        
        7. Conclusion 291
        
        References 291
      - CHAPTER 42. LASER INDUCED SURFACE ALLOY FORMATION AND DIFFUSION OF ANTIMONY IN ALUMINIUM 293
        
        1. Introduction 293
        
        2. Experimental 294
        
        3. Results 294
        
        4. Discussion 297
        
        5. Conclusions 299
        
        References 299
      - CHAPTER 43. THE APPLICATION OF LOW ANGLE RUTHERFORD BACKSCATTERING AND CHANNELLING TECHNIQUES TO DETERMINE IMPLANTATION INDUCED 301
        
        1. Introduction 301
        
        2. Experimental 301
        
        3. Results 302
        
        4. Discussion 304
        
        5. Conclusions 305
        
        References 306
      - CHAPTER 44. THE APPLICATION OF ION BEAM METHODS TO DIFFUSION AND PERMEATION MEASUREMENTS 307
        
        2. Method 307
        
        1. Introduction 307
        
        3. Experimental setup 309
        
        4. Results and discussion 310
        
        5. Conclusion 311
        
        References 312
      - CHAPTER 45. D AND 3He TRAPPING AND MUTUAL REPLACEMENT IN MOLYBDENUM 313
        
        1. Introduction 313
        
        2. Experimental 313
        
        3. Results 314
        
        4. Discussion 315
        
        References 317
      - CHAPTER 46. DEUTERIUM ENRICHMENT DURING ION BOMBARDMENT IN VD0.01 ALLOYS 319
        
        2. Experimental 319
        
        1. Introduction 319

Proceedings of the Fourth International Conference on Ion Beam Analysis, Aarhus, June 25-29, 1979

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